PRODUCT TECHNOLOGIES
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Electronic Grade Ultrapure Ozone Gas Generator
- Category： Products
Summary:
The realization technology of ozone with high concentration, super purity and deep fine process is the basis of the realization of this ozone gas generator. Ozone is used in the electronics industry to form CVD and ALD films, oxide growth, photoresist removal and a variety of cleaning applications.
GTC generator can produce super clean ozone with high concentration, large flow and high pressure. It is modular, compact, concise and visual.
Intent to submit
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♦High ozone concentration,up to 400mg/L；
♦High ozone output pressure,up to 3.0bar；
♦High gas flow；
♦Super pure generation technology,super pure materials and processes are adopted to avoid metal pollution and precipitation;
♦Water cooled,no nitrogen additive technology；
♦Patented ozone special structure design,ensure uniform discharge consistency,ensure more stable system performance；
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About Guolin
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Qingdao Guolin Semiconductor Technology Co., Ltd.
Address: No.188, Zhuzhou Road, Laoshan District, Qingdao, Shandong, China
Contact: 13969780787 / 15753263717
Email: xhk@china-guolin.com
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Qingdao Guolin Semiconductor Technology Co., Ltd. Copyright(c)2022 All Rights Reserved ICP：12021927
Contact Information
Qingdao Guolin Semiconductor Technology Co., Ltd.
Address: No.188, Zhuzhou Road, Laoshan District, Qingdao, Shandong, China
Contact：13969780787 / 15753263717
Email：xhk@china-guolin.com
Qingdao Guolin Semiconductor Technology Co., Ltd.