PRODUCT TECHNOLOGIES
Ozone Gas Delivery System
Category:
Products
Summary:
Ozone gas delivery system can produce super pure and reliable ozone gas. In a clean semiconductor environment, thin film deposition processes such as atomic layer deposition (ALD) and etching (ALE) are realized by ozone gas reaction. High purity and high concentration ozone gas can produce higher film density, so as to improve the output, performance and reliability of products.
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Application field：
Chemical vapor deposition Atomic layer deposition Oxidation growth Surface treatment Cleaning,wet application and others The system adopts high concentration,super pure ozone generation technology,accurate ozone concentration detection,flow,pressure control and stable power supply,safety protection and other additional functions.Is a kind of free combination,can be highly integrated modular ozone system,and can be equipped with multiple groups of GTC model ozone generators,forming a multi-channel system,to meet the needs of different ozone gas applications.
♦High ozone concentration,up to 400mg/L；
♦High ozone capacity,up to 220g/h;
♦High gas flow；
♦Super pure generation technology,super pure materials and processes are adopted to avoid metal pollution and precipitation;
♦Water cooled,no nitrogen additive technology；
♦Number of channels 1-4 Optional；
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Qingdao Guolin Semiconductor Technology Co., Ltd.
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