Electronic Grade Ultrapure Ozone Gas Generator

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Summary:

The realization technology of ozone with high concentration, super purity and deep fine process is the basis of the realization of this ozone gas generator. Ozone is used in the electronics industry to form CVD and ALD films, oxide growth, photoresist removal and a variety of cleaning applications.<br> GTC generator can produce super clean ozone with high concentration, large flow and high pressure. It is modular, compact, concise and visual.

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Product Description

♦High ozone concentration,up to 400mg/L；
♦High ozone output pressure,up to 3.0bar；
♦High gas flow；
♦Super pure generation technology,super pure materials and processes are adopted to avoid metal pollution and precipitation;
♦Water cooled,no nitrogen additive technology；
♦Patented ozone special structure design,ensure uniform discharge consistency,ensure more stable system performance；

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