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Semiconductor High Concentration Ozonated Water System

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Summary:

The semiconductor grade high concentration ozonated water system is specially developed and designed for the application of photovoltaic, semiconductor and other electronic industries. The system adopts high concentration and super pure ozone generation technology, unique mixing and control technology, and selects high-quality and super pure ozone resistant materials to provide ultra clean and high concentration ozonated water for semiconductor and photovoltaic applications.

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Product Description

♦Ozone water output is stable,ozone water flow is 10-60L/min,controllable and adjustable;
♦Using ultra pure and efficient mixing and control technology,ozone dissolved concentration is 5-150ppm;
♦Fast ozone concentration output speed,high gas output pressure,3.0bar;
♦Adopt ultra pure generation technology,ultra pure materials and processes to avoid metal pollution and precipitation;
♦The equipment has the functions of interlocking and linkage protection,and timely and effective warning and protection in case of abnormality.
♦Data transmission and remote control can be realized.

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