The group standard "Technical Requirements for Semiconductor-Grade Ozone Generators" has been officially released and implemented.

On December 9, 2025, the first group standard in China’s semiconductor industry—“Technical Requirements for Semiconductor-Grade Ozone Generators” (T/CIET 1946-2025)—led by Guolin Semiconductor was officially released and put into effect. The development of this standard promotes the standardized development of the industry, drives technological innovation and supply-chain collaboration, and provides a scientific and quantifiable basis for the selection and application of ozone equipment in the semiconductor and panel-display industries.

1. Filling the gap in domestic ozone standards for the semiconductor industry and helping to standardize critical semiconductor equipment.

With the rapid development of the global semiconductor industry, the demand for standardization and domestic production of critical process equipment is becoming increasingly prominent. As an indispensable piece of equipment in semiconductor manufacturing, ozone generators play a vital role in key processes such as thin-film deposition, cleaning, and resist removal. Their technical performance and reliability directly affect the yield of chip fabrication.

For a long time, China has lacked unified technical standards in the field of semiconductor-grade ozone generators, which has hindered the industry’s standardized development and independent innovation. To address this issue, Guolin Semiconductor has fully leveraged its technological leadership to take the lead in initiating the drafting of the group standard “Technical Requirements for Semiconductor-Grade Ozone Generators.” By establishing a comprehensive system of technical specifications and reliability standards, the company has filled a critical gap in domestic standards in this field.

2. Pool industry strengths and work together to promote the implementation of standards.

In 2025, Guolin Semiconductor Co., Ltd. will serve as the lead entity, collaborating with the Standardization Working Committee of the China International Economic Promotion Association, as well as Beijing North Huachuang Microelectronics Equipment Co., Ltd., HuaHai Qingke Co., Ltd., Tuojing Chuanyi (Shenyang) Semiconductor Equipment Co., Ltd., Beijing Electric Control Integrated Circuit Manufacturing Co., Ltd., Shanghai Bitong Semiconductor Energy Technology Co., Ltd., Northern Integrated Circuit Technology Innovation Center (Beijing) Co., Ltd., Shengjisheng Semiconductor Technology (Wuxi) Co., Ltd., Shengmei Semiconductor Equipment (Shanghai) Co., Ltd., Hangzhou Xingyuanchi Semiconductor Co., Ltd., Jiangsu Yadian Technology Co., Ltd., Shanghai Zhichun System Integration Co., Ltd., Zhejiang Qier Mechanical and Electrical Technology Co., Ltd., Shanghai Zhengfan Technology Co., Ltd., Tianjin Aolsiman New Energy Technology Co., Ltd., and Shandong Zhiwei Environmental Protection Technology Co., Ltd.—a total of 17 organizations representing numerous well-known enterprises from various sectors including key semiconductor components, equipment, and end-users—to jointly develop, discuss, and review the standards, thereby ensuring their scientific rigor, applicability, and industry representativeness.

On March 5, 2025, the standard work was approved for project initiation.

March–August 2025: Drafting and preparation of the standard, as well as soliciting comments;

On August 27, 2025, the group standard review for “Technical Requirements for Semiconductor-Grade Ozone Generators” will be held.

On September 19, 2025, the group standard “Technical Requirements for Semiconductor-Grade Ozone Generators” was completed and submitted for approval.

On December 9, 2025, the group standard “Technical Requirements for Semiconductor-Grade Ozone Generators” was officially released and put into effect.

3. Lead development with standards and support the localization of semiconductor ozone equipment.

In the future, Qingdao Guolin Semiconductor will continue to leverage its own technological R&D capabilities and industrialization experience to actively participate in the development of standards for critical semiconductor equipment, thereby promoting the standardization of domestically produced high-end equipment. Taking the implementation of these standards as an opportunity, the company will continuously optimize product performance, providing more reliable and efficient domestically developed solutions for the global semiconductor industry and contributing to the high-quality development of China’s semiconductor ozone equipment sector.